Cleanroom and Microfabrication Space
Equipment and Capabilities
- Süss Mask Alginer MA6
- Parylene-C Coater (CVD)
- Sentec Reactive-Ion Etcher
- Ebeam PVD
- Braun Glovebox Facility for Prototyping of Optoelectronic Devices
- Pixdro lp50 Inkjet Printer with Dimatix Printhead
